Hysteresis compensation and decoupling control of a parallel XYΘ nanopositioning system in linear and angular coupled positioning

作者：Yanding Qin, Jie Yuan, Haitao Wu, Bijan Shirinzadeh, Jianda Han · 发表于：Mechanical Systems and Signal Processing · 年份：2025 · DOI：10.1016/j.ymssp.2025.112794 · 被引用次数：4 · 研究领域：Piezoelectric Actuators and Control、Iterative Learning Control Systems、Advanced Measurement and Metrology Techniques