Mechanism study of low-resistance ohmic contact in Cr/Au electrodes on (100) β-Ga2O3 substrate with rapid thermal annealing

作者：Xin Qi, Yi Shen, Chengxi Ding, Yuanhui Zuo, Qilong Yuan, Lin Gu, Shengnan Zhang, Xiaoqing Huo, Qing‐Chun Zhang, Hong-Ping Ma · 发表于：Applied Surface Science · 年份：2024 · DOI：10.1016/j.apsusc.2024.161970 · 被引用次数：13 · 研究领域：Ga2O3 and related materials、ZnO doping and properties、Advanced Photocatalysis Techniques