Phase Evolution and Substrate-Dependent Passivation Behavior of ALD-Ru Films under Oxidizing Conditions

作者：Youngseo Na, Hyunjin Lim, Seungchae Lee, Yehbeen Im, Donguk Kim, Kangbaek Seo, Changhwan Choi · 发表于：Extended Abstracts of the 2025 International Conference on Solid State Devices and Materials · 年份：2025 · DOI：10.7567/ssdm.2025.ps-11-09