Yehbeen Im

发表论文 6 篇

代表论文

• Area-selective atomic layer deposition of ruthenium using O2 plasma-enhanced self-assembled monolayers (2026 · Applications of Surface Science)
• Plasma-thermal atomic layer etching of molybdenum using CF4 surface fluorination and Ar plasma removal (2026 · Applications of Surface Science)
• Chemical and Elecrtrical Charaterization of ALD Cobalt Nitride (CoN) as an Alternative Barrier for Advanced Cu Interconnects (2025 · International Interconnect Technology Conference)
• Phase Evolution and Substrate-Dependent Passivation Behavior of ALD-Ru Films under Oxidizing Conditions (2025 · Extended Abstracts of the 2025 International Conference on Solid State Devices and Materials)
• Suppression of Size Effect in MoPd Thin Films for Nanoscale Interconnects (2025 · International Interconnect Technology Conference)
• Temperature-Dependent ALD and Quasi-ALE Behavior of Ruthenium Thin Films (2025 · International Interconnect Technology Conference)