Review: Application and development of machine learning in semiconductor manufacturing for automated wafer map pattern recognition and classification

作者：Wei Zhou, Guoxing Wang, Yongfu Li · 发表于：Integration · 年份：2025 · DOI：10.1016/j.vlsi.2025.102595 · 被引用次数：3 · 研究领域：Industrial Vision Systems and Defect Detection、Silicon and Solar Cell Technologies、Advancements in Photolithography Techniques