Low-temperature synthesis of Al-rich rock salt Cr1−xAlxN films with selective metal ion bombardment by synchronized substrate bias pulsing

作者：Sanath Kumar Honnali, Robert Boyd, Daniel Lundin, Grzegorz Greczyński, Ganpati Ramanath, Per Eklund · 发表于：Applied Physics Letters · 年份：2025 · DOI：10.1063/5.0287938 · 被引用次数：1 · 研究领域：Metal and Thin Film Mechanics、Diamond and Carbon-based Materials Research、Semiconductor materials and devices

We demonstrate a two-stage low-temperature (<100 °C) growth process for obtaining Al-rich rock salt-structured Cr1−xAlxN films by high-power impulse magnetron sputtering (HiPIMS) with synchronized substrate bias pulsing. The first stage features selective ∼100 eV Al+ ion irradiation that promotes out-of-plane (002) texture in rock salt Cr0.3Al0.7N. Film thickness was limited to <∼230 nm above which wurtzite-AlN formation was observed. The second stage combines the synchronized bombardment of ∼100 eV Al+ and Cr+ ions, allowing the synthesis of rock salt Cr1−xAlxN with unprecedentedly high Al contents up to x ≈ 0.7 without wurtzite-AlN formation. Peening effects from heavier Cr+ ions stabilize rock salt Cr1−xAlxN with greater Al content, induce compressive stresses, and densify the film. In contrast, single-stage DC magnetron sputtering or HiPIMS using floating or continuous bias suffers from poor crystallinity, Ar entrapment, and film delamination. These findings establish that two-stage growth with selective ion bombardment is an attractive approach for tailoring stable single-phase Al-rich Cr1−xAlxN coatings with controlled properties for applications that do not allow high temperature processing.