Low-temperature growth and characterization of β-Ga2O3 thin films by ECR-PEMOCVD

作者：Shuang Zhao, Jie Chen, Chunyu Ma, Jiansheng Li, Xuan Wang, Yaxin Zhao, Hongsheng Liu, Karpinski Dzmitry, Fuwen Qin · 发表于：Materials Science in Semiconductor Processing · 年份：2025 · DOI：10.1016/j.mssp.2025.109588 · 被引用次数：7 · 研究领域：Ga2O3 and related materials、ZnO doping and properties、Electronic and Structural Properties of Oxides