A design of green slurry for copper/cobalt barrier-step chemical mechanical polishing with controlled removal selectivity and dynamic galvanic corrosion inhibition

作者：Pengfei Chang, Zisheng Huang, Huiqin Ling, Yunwen Wu, Ming Li, Tao Hang · 发表于：Surfaces and Interfaces · 年份：2024 · DOI：10.1016/j.surfin.2024.105335 · 被引用次数：15 · 研究领域：Advanced Surface Polishing Techniques、Advanced Machining and Optimization Techniques、Advanced materials and composites