Ion beam smoothing of fused silica at atomic-scale assisted by damage recovery using inductively coupled plasma

作者：Bing Wu, Shaoxiang Liang, Junqi Zhang, Xuemiao Ding, T.-Y. Chiu, Pei Huang, Yinhui Wang, Hui Deng · 发表于：Precision Engineering · 年份：2024 · DOI：10.1016/j.precisioneng.2024.08.003 · 被引用次数：5 · 研究领域：Advanced Surface Polishing Techniques、Diamond and Carbon-based Materials Research、Ion-surface interactions and analysis