First-principles insight into the pH-dependency of the corrosion inhibition ability of benzotriazole and 1,2,4-triazole for copper in chemical mechanical polishing slurry

作者：Pengfei Chang, Zisheng Huang, Huiqin Ling, Yunwen Wu, Ming Li, Tao Hang · 发表于：Corrosion Science · 年份：2024 · DOI：10.1016/j.corsci.2024.112002 · 被引用次数：37 · 研究领域：Advanced Surface Polishing Techniques、Advanced materials and composites、Corrosion Behavior and Inhibition