Correction of the spherical aberration of a 200 kV TEM by means of a hexapole-corrector

作者：Maximilian Haider, Gerhard Braunshausen, Eugen Schwan · 发表于：Optik · 年份：1995 · 被引用次数：122 · 研究领域：Electron and X-Ray Spectroscopy Techniques、Advanced Electron Microscopy Techniques and Applications、Advancements in Photolithography Techniques

Correction of the spherical aberration of a 200 kV TEM by means of a Hexapole-corrector. A spherical aberration corrector for a 200kV Transmission Electron Microscope (TEM) has been designed, constructed and tested. This development makes an improvement in the resolving power of modern, spherical aberration limited TEMs possible. The corrector was first tested on an electron optical test-bench so that the correction principle could be checked. With this test-bench the symmetry of the various multipole-fields generated with the multipole-elements could be tested and the high number of individual coils was trimmed in order to attain the required precise symmetry of the multipole-fields. In a second step the corrector was incorporated in a 200 kV TEM in order to demonstrate the compensation of the spherical aberration of the objective lens with the Hexapole-corrector and to begin the development of fast and reliable alignment procedure. From this would appear that the setup of a C 3 corrected high resolution TEM, equipped with a-field-emission gun (FEG). approaching a point resolution of 1 A (or better) is feasible.