Correlation between magnetic and structural properties of Ni/sub 80/Fe/sub 20/ sputtered thin films deposited on Cr and Ta buffer layers

作者：R.C. Jerome, T. Valet, Pierre Galtier · 发表于：IEEE Transactions on Magnetics · 年份：1994 · DOI：10.1109/20.334252 · 被引用次数：29 · 研究领域：Magnetic properties of thin films、Magnetic Properties and Applications、Microstructure and Mechanical Properties of Steels

We studied the magnetic properties and structure of sputtered Ni/sub 80/Fe/sub 20/ films, on Si(100) substrates with either a Cr or Ta buffer. The films deposited on Ta buffers exhibit a very low coercive field (Hc/spl ap/0.9 Oe), much smaller than those deposited on Cr buffers (Hc/spl ap/2.5 Oe). Moreover, by transmission electron microscopy (both plane views and cross-sections), it was established that the Ta buffer induces a marked (111) perpendicular texture and a small lateral grain size (D/spl ap/150 /spl Aring/). This is in strong contrast with the absence of any preferential orientation and the larger crystallite size (D/spl ap/400 /spl Aring/) of the films deposited on Cr. The very low coercivity obtained on Ta buffers is tentatively explained considering that the film geometry, together with the induced texture, constrained the magnetization to lie in (111) crystallographic planes, which is shown to strongly suppress the possible sources of local anisotropy fluctuations.>