Fast waveguide geometry extraction using an optical measurement method

作者：Jiyao Yu, Bowen Li, Yu Li, G. Cao, Junbo Feng · 发表于：Applied Optics and Photonics China · 年份：2023 · DOI：10.1117/12.2645404 · 研究领域：Engineering

A kind of waveguide geometry extraction method based on optical measurements was proposed. By designing two Mach-Zehnder interferometers (MZIs) with different arm lengths, the width and height of the physical geometry of fabricated waveguides could be accurately extracted with the help of MZIs’ optical measured spectrum results. The extracted results on the CUMEC multi-project wafer service (MPW) showed that the mean width and height of the fabricated waveguide were 463.46 nm and 213.58 nm, respectively, while their standard deviation values were 3.82nmand 2.13 nm, respectively.