Design and simulation study of a MEMS-based three-dimensional combined hydrophone for UUV applications

作者：N. Cheng, Haoxuan Li, Renxin Wang, Peng Zhang, Licheng Jia, Guojun Zhang, Wendong Zhang, Yuhua Yang · 发表于：Sensor Review · 年份：2025 · DOI：10.1108/sr-11-2024-0921 · 被引用次数：3

Purpose This paper aims to present the design of a micro-electro-mechanical system (MEMS)-based three-dimensional combined vector hydrophone tailored for unmanned underwater vehicles (UUVs). The proposed design addresses the left-right ambiguity inherent in conventional MEMS hydrophones and enhances acoustic sensing capabilities to support improved UUV performance in underwater environments. Design/methodology/approach A novel MEMS-based three-dimensional vector hydrophone (M3DH) is proposed, integrating a highly sensitive MEMS chip with a piezoelectric ceramic-based scalar channel. A theoretical model of the hydrophone’s packaging was developed, and its acoustic performance was analyzed through COMSOL Multiphysics 6.2 simulations. Experimental validation of the hydrophone’s sensitivity and directional characteristics was conducted in a standing wave tank. Findings The MEMS-based three-dimensional combined hydrophone (M3DH) achieved a triaxial vector channel sensitivity of −175.6 dB at 800 Hz (re 1 V/µPa) and a scalar channel sensitivity of −186.3 dB (0 dB = 1 V/µPa). In addition, at 500 Hz, the vector channel exhibited a distinct “8”-shaped directivity pattern, whereas the scalar channel maintained a circular omnidirectional response. The hydrophone demonstrated excellent acoustic performance in three-dimensional space, effectively providing comprehensive acoustic information for small underwater platforms. Originality/value This research addresses the left-right ambiguit...