Effect of magnetic field strength on magnetized inductively coupled plasmas: A PIC/MCC simulation study

作者：Minglun Tian, Pengze Xiao, Zhaoyu Chen, Zili Chen, Yu Wang, Zhenhua Bi, Ming-Liang Zhao, Zhipeng Chen, Wei Jiang, Ya Zhang · 发表于：Physics of Plasmas · 年份：2026 · DOI：10.1063/5.0344363 · 研究领域：Plasma Diagnostics and Applications、Magnetic confinement fusion research、Vacuum and Plasma Arcs

A two-dimensional axisymmetric Particle-in-Cell/Monte Carlo collision model is employed to investigate the effects of magnetic field strength on magnetized inductively coupled plasma. The results show that increasing magnetic field strength significantly modifies plasma characteristics and energy transport. The electron density increases and shifts toward the coil region, indicating enhanced confinement. Meanwhile, the bulk electron energy decreases, while localized high-energy regions near the dielectric window are strengthened, suggesting a transition from volumetric to localized heating. Spatiotemporal analysis reveals that the magnetic field suppresses electron transport and reduces the penetration depth of the inductive electric field, leading to a more localized power deposition profile. These results provide kinetic insights into magnetic-field-controlled plasma behavior and are relevant for optimizing plasma processing applications.