Generation of deep ultraviolet femtosecond 194.3 nm laser by cascaded optical parametric amplification

作者：Jiaqin Li, N Li, XJ Huang, Wenxu Yang, Hailong Zhang, Jinhui Li, Wenxiong Lin, H G Liu · 年份：2026 · DOI：10.1117/12.3116339 · 研究领域：Solid State Laser Technologies、Crystal Structures and Properties、Laser-Matter Interactions and Applications

We demonstrate a compact femtosecond laser system that generates deep-ultraviolet radiation at 194.3 nm. The systememploys cascaded optical parametric amplification pumped by the second-harmonic of a 1035 nmfemtosecondfundamental laser. The signal laser at 780 nm with the maximum power of 748 mW is achieved after two optical parametric amplification stages. Through sum-frequency generation in a BBO (β-BaB2O4) crystal between the signal andthe fourth harmonic of the fundamental laser, we realize the generation of high power deep-ultraviolet radiation at 194.3nm. The maximum output power is 33.2 mW at 194.3 nm, with a conversion efficiency of 4.4% fromthe 780 nmsignal laser.