Frequency stability enhancement of MEMS resonator using Duffing nonlinearity

作者：Yutao Xu, Chun Wang, Juan Ren, Junsheng Lv, Gang Shao, Xueyong Wei · 发表于：International Journal of Mechanical Sciences · 年份：2026 · DOI：10.1016/j.ijmecsci.2026.111272 · 被引用次数：4 · 研究领域：Mechanical and Optical Resonators、Advanced MEMS and NEMS Technologies、Acoustic Wave Resonator Technologies