Mechanical-chemical synergy in photochemical mechanical polishing monocrystalline yttrium aluminum garnet: An integrated machine learning, response surface, and mathematical methodology

作者：Xingchen Guo, Jinxing Huang, Zhigang Dong, Renke Kang, Shang Gao · 发表于：Advanced Engineering Informatics · 年份：2025 · DOI：10.1016/j.aei.2025.104198 · 被引用次数：17 · 研究领域：Laser Material Processing Techniques、Advanced Surface Polishing Techniques、Nonlinear Optical Materials Studies