Manipulation of ultramicropore sizes of resin‐derived carbon granules for diverse fluoro‐electronic gas purifications

作者：Xuan Wei, Shengjun Du, Yanyang Zheng, Junjie Peng, Guang Miao, Xiangjun Meng, Xiangyu Li, Xinxin Li, Jing Xiao · 发表于：AIChE Journal · 年份：2025 · DOI：10.1002/aic.70155 · 被引用次数：2 · 研究领域：Inorganic Fluorides and Related Compounds、Molten salt chemistry and electrochemical processes、Fiber-reinforced polymer composites

Abstract Ultrapure fluoride electronic gases (e.g., C 3 F 8 and C 2 HF 5 ) constitute indispensable cleaning and etching gases in semiconductor manufacturing. However, the presence of structurally analogous impurities like C 3 F 6 and C 2 ClF 5 poses great purification challenges. Herein, we explored resin‐derived carbon granules (C‐PR‐ x ) with fine‐tuned ultramicroporosity for adsorptive separation of C 3 F 6 /C 3 F 8 , C 2 ClF 5 /C 3 F 8 , and C 2 ClF 5 /C 2 HF 5 gas pairs. C‐PR‐850 (5.4 Å) performs C 3 F 6 /C 3 F 8 molecular sieving behavior with a C 3 F 6 uptake of 0.72 mmol g −1 at 0.1 kPa. C‐PR‐900 (5.6 Å) exhibits high C 2 ClF 5 /C 3 F 8 IAST selectivity of 49.9 at ambient conditions. Furthermore, C‐PR‐950 (5.9 Å) achieves preferential C 2 ClF 5 impurity removal during C 2 HF 5 purification with a high capacity of 0.79 mmol g −1 via differential confinement effects. Breakthrough experiments validate excellent purification performance, yielding >99.9999% (6 N) grade C 3 F 8 and C 2 HF 5 . The scalability, mechanical stability, and moisture resistance of C‐PR‐ x make them attractive as industrial adsorbents. This work provides a viable solution for developing scalable industrial carbon granules for effective electronic gas purification.