Machine learning-guided phase-structure design for optimizing the ferroelectric properties of doped HfO2

作者：Yan Zhang, Zihao Lu, Zihao Lu, Yuan Yang, Xinyuan Wang, Yuanzhen Meng, Jiahao Yue, Jianing Wang, Dao Wang, Yabing Sun, Wei Li, Xianwei Wang, Xubing Lu · 发表于：Materials Science in Semiconductor Processing · 年份：2025 · DOI：10.1016/j.mssp.2025.110291 · 被引用次数：3 · 研究领域：Ferroelectric and Negative Capacitance Devices、Ferroelectric and Piezoelectric Materials、Advanced Sensor and Energy Harvesting Materials