Back‐End‐Of‐Line Integrated Non‐Volatile Reconfigurable Devices for Programmable Photonic Integrated Circuits

作者：Kai Xu, Maoliang Wei, Yiting Yun, Yingchun Wu, Chunlei Sun, Bo Tang, Junying Li, W. B. Wang, Kunhao Lei, Hui Ma, Tao Xu, Lan Li, Ming Li, Hongtao Lin · 发表于：Laser & Photonics Review · 年份：2025 · DOI：10.1002/lpor.202501846 · 被引用次数：3 · 研究领域：Neural Networks and Reservoir Computing、Photonic and Optical Devices、Phase-change materials and chalcogenides

ABSTRACT Chalcogenide phase change materials (PCMs) integrated photonics is characterized by zero static power consumption and compact footprint, offering a breakthrough tuning method for large‐scale programmable photonic integrated circuits (PICs). To facilitate the development of large‐scale PCMs‐based PICs, the performance requirements of units in non‐volatile PICs for specific applications are analyzed, and back‐end‐of‐line (BEOL) integrated non‐volatile devices with enhanced performance are proposed. First, loss reduction is proven to benefit reconfigurable filtering to a significant degree. With the integration of Sb 2 Se 3 , a low‐loss (0.38 dB π −1 ) phase shifter with high phase modulation efficiency (0.135π µm −1 ) is realized. Meanwhile, the participation of wide‐range attenuations enables more versatile programming, a Ge 2 Sb 2 Se 4 Te 1 ‐based attenuator is developed, achieving high switching endurance (>10 000 cycles) with a large extinction ratio (>40 dB). Second, a non‐volatile 2 × 2 Mach–Zehnder interferometer (MZI) is proposed, since lower switch crosstalk (<−20 dB) enables improved encoding performance with reduced bit error rates (BER). Finally, sufficient multilevel precision is crucial for optical computing because of the direct association between mapping errors and prediction accuracy. Accordingly, an add‐drop microring resonator (MRR) is fabricated, achieving a multilevel precision of 44 levels. This study presents an essential step to scalin...