Tip-based vibration carving of shape-customized convex microstructures: principle, modeling, and experiments

作者：Jiahui Liu, Pingfa Feng, Hansong Ji, Jianfu Zhang, Xiangyu Zhang, Jianjian Wang · 发表于：International Journal of Extreme Manufacturing · 年份：2025 · DOI：10.1088/2631-7990/ae1db7 · 被引用次数：2 · 研究领域：Advanced machining processes and optimization、Advanced Surface Polishing Techniques、Nanofabrication and Lithography Techniques

Abstract Convex structures are a crucial type of surface functional structure whose shape significantly affects their performance. Tip-based machining and vibration texturing are two groups of state-of-the-art subtractive fabrication methods for micro/nano structures, each offering distinct advantages: tip-based machining excels in achieving small feature sizes, whereas vibration texturing improves production efficiency. This study aims to combine these methods to create a more powerful micromachining technique, namely tip-based vibration carving (TVC), particularly suited for fabricating shape-customized convex microstructures. In TVC, the vibration trajectory and nominal carving motion of the tip tool are parallel to the workpiece surface. In each vibration cycle, the tip tool removes some material while the remaining material becomes one convex microstructure. Therefore, the shape of convex microstructures can be customized by the design of vibration trajectories. By adopting high-frequency vibration, the production rate of convex microstructures can be highly efficient. Based on the fundamental principle of TVC, three types of TVC methods—sine-shape, O-shape, and U-shape TVC—are proposed, each employing distinct vibration trajectories. A prediction model for surface generation of convex microstructures is established based on the fusion of process mechanism and experimental data. Finite element simulations are conducted to analyze the material removal and deformation proc...