Nonlinear dynamics in MEMS systems: Overcoming pull-in challenges and exploring innovative solutions

作者：Chun‐Hui He, Yutong Cui, Ji‐Huan He, Eerdun Buhe, Qingmei Bai, Qiu Xu, Jinfeng Ma, Abdulrahman Ali Alsolam, Meigeng Gao · 发表于：Journal of low frequency noise, vibration and active control · 年份：2025 · DOI：10.1177/14613484251385061 · 被引用次数：15 · 研究领域：Advanced MEMS and NEMS Technologies、Mechanical and Optical Resonators、Geophysics and Sensor Technology

Micro-Electro-Mechanical Systems (MEMS) play a pivotal role in modern technology, with applications ranging from biomedical monitoring to inertial navigation, RF communication, and energy harvesting. However, their nonlinear dynamics, arising from electrostatic coupling, geometric and material nonlinearities, and multi-physics interactions, present substantial challenges. Pull-in instability, predominantly initiated by even-order nonlinear terms, signifies a pivotal concern that can culminate in device failure, stiction, and irreversible damage. This paper presents novel methodologies for the comprehensive elimination of pull-in instability in MEMS. The re-engineering of the spring in the MEMS oscillator has yielded a specialized spring with a meticulously designed restoring-force formula, which effectively counteracts the influence of even-order nonlinear forces to mitigate pull-in instability. Furthermore, modifying the MEMS system’s structure, material properties, or governing equations to eliminate the quadratic nonlinear term—a primary cause of pull-in instability—significantly delays the onset of pull-in, despite the persistence of higher-order even nonlinearities. A novel MEMS model has been developed to address higher-order even nonlinearities with high effectiveness. When parameters Ω i and ω i are suitably chosen, this model fully eliminates all even nonlinearities. Furthermore, AI-assisted modeling techniques are employed to capture the complex nonlinear behaviors ...