Effects of single- and multi-pulse femtosecond laser irradiation on N-type 4H-SiC surface morphology, structural transformation, and accompanying defect generation

作者：M. Wang, Chengrui Tian, Runsheng Zheng, Yan Liu, Mingyang Wei, Qingbo Li, Yan Li, Yan Li, Yongfu Li, Yongfu Li, Yanmin Zong, Xian Zhao · 发表于：Optics & Laser Technology · 年份：2025 · DOI：10.1016/j.optlastec.2025.114189 · 被引用次数：3 · 研究领域：Laser Material Processing Techniques、Laser-induced spectroscopy and plasma、Advanced Fiber Laser Technologies