Co-engineered diamond NV centers via MPCVD for non-invasive quantum sensing in integrated circuits

作者：Haoran Zheng, Na Li, Zhengfeng Zhang, Jingcheng Huang, Qilong Wu, Xuanming Shen, Huihui Yu, Sibo Zhao, Yanzhang Qu, Yanan Wang, Dong Li, Yuan Zhang, Xia Guo, Xun Yang, Guanxiang Du, C. X. Shan · 发表于：Science China Physics Mechanics and Astronomy · 年份：2025 · DOI：10.1007/s11433-025-2790-1 · 被引用次数：2 · 研究领域：Diamond and Carbon-based Materials Research、Semiconductor materials and devices、Metal and Thin Film Mechanics