Study of Deformation and Stress in Electric Microactuators

作者：Kangming Peng, Zhiwei Huang, Jiaji Chen, Kunrui Cai · 发表于：Advances in transdisciplinary engineering · 年份：2025 · DOI：10.3233/atde251007 · 研究领域：Advanced machining processes and optimization、Advanced MEMS and NEMS Technologies、Advanced Machining and Optimization Techniques

On the basis of the original electric microactuators, a thermal actuator with a simple structure capable of realizing micro-adjustable deformation and multi-segment deformation is proposed, and the degree of deformation and multi-segment deformation can be realized by adjusting the position of the fixing bolt. The electric microactuator adopts symmetrical structural design, which mainly consists of two fixed electrodes, fixed bolts, and substrate, with the fixed electrode ends as positive and negative electrodes, and the substrate is made of polysilicon material. When the circuit is connected, current flows through the polysilicon, and the polysilicon deforms under the action of Joule heat, thus realizing the function of actuator deformation. Constructing the model in finite element analysis and adjusting the voltage change of 1V can realize a microvariation of 7.297×10–10µm, and a microvariation of 3.857×10–10µm can be realized by adjusting the change of 5µm of the fixing bolts while the original voltage value remains unchanged. In this study, the effect of conductivity and thermal conductivity on the deformation of electric microactuators was investigated. The deformation of the electric microactuator is amplified in proportion to the stress after increasing the substrate conductivity. The deformation of the electric microactuator decreases proportionally to the stress after increasing the thermal conductivity of the substrate. This study can provide a design basis for the ...