Growth and optical properties of erbium-doped gallium nitride thin films prepared by pulsed direct current magnetron sputtering

作者：Youshun Wang, Xin Chen, Tianyu Wu, Wei Wei, Xinyi Sui, Erqing Xie, Bo Yang, Zhenxing Zhang · 发表于：Applied Surface Science · 年份：2025 · DOI：10.1016/j.apsusc.2025.164701 · 被引用次数：3 · 研究领域：GaN-based semiconductor devices and materials、Ga2O3 and related materials、Acoustic Wave Resonator Technologies