A high-performance NO 2 gas sensor based on silicon nanowire array

作者：Zhenyu Jin, Zhixiao Fang, Zai Wang, Wentao Wu, Dongfang Yan, Xun Yang, Yu Gao, Weihuang Yang, Dong Linxi, Gaofeng Wang, Xin Tong, Zhenhua Wu, S. K. Lazarouk, В. А. Лабунов, Chaoran Liu · 发表于：Physica Scripta · 年份：2025 · DOI：10.1088/1402-4896/adffc8 · 被引用次数：3 · 研究领域：Gas Sensing Nanomaterials and Sensors、Analytical Chemistry and Sensors、Nanowire Synthesis and Applications

Abstract Nitrogen dioxide (NO 2 ) gas detection is crucial for atmospheric environmental safety, industrial production monitoring, and traffic exhaust emission control. Reported detection devices often suffer from poor portability, insufficient selectivity, and demanding application requirements. Herein, we present a portable high-specificity and sensitivity NO 2 gas sensor based on silicon nanowire array field-effect transistors (SiNW FETs). The NO 2 gas sensor is fabricated on a (111) silicon-on-insulator (SOI) by the standard MEMS technology, which achieving high consistency in the dimensions of silicon nanowires. The experimental results demonstrated that the as-fabricated NO 2 gas sensor has a high sensitivity of 20 kΩ ppm −1 and a detectable minimum NO 2 concentration of 1.31 ppm. In addition, the NO 2 gas sensor exhibits a remarkable specificity, as evidenced by its significantly higher response to NO 2 compared to SO 2 , CO, NH 3 , O 3 , C 2 H 5 OH and air. The developed portable sensor signal processing system achieves real-time monitoring and display of NO 2 concentration in the atmosphere. Furthermore, this research provides a high precision, easy installation and low cost NO 2 detector, indicating a good potential for industrial and civil applications in the future.