Exploration on the oxidation resistance of TiAlNbN films: Mechanisms of nanopore regulation and crack suppression

作者：Yangyang Ma, Zhichao Jiao, Zhiyuan Huang, Qing Zhou, Tiange Huang, Xing Ran, Z. G. Wang, Longshi Qiu, Haishan Teng, Xiaojiang Lu, Zhao Shen, Haifeng Wang · 发表于：Corrosion Science · 年份：2025 · DOI：10.1016/j.corsci.2025.113273 · 被引用次数：66 · 研究领域：Metal and Thin Film Mechanics、GaN-based semiconductor devices and materials、Semiconductor materials and devices