Evolution of microstructure of sputtered films deposited using different indium gallium zinc oxide targets upon annealing

作者：Jie Chen, Rui Du, Shuhan Liu, Chao Qi, Benshuang Sun, Ruolan Zhong, Jilin He · 发表于：Ceramics International · 年份：2025 · DOI：10.1016/j.ceramint.2025.08.368 · 被引用次数：3 · 研究领域：ZnO doping and properties、Thin-Film Transistor Technologies、Semiconductor materials and devices