Low-stress optimization and enhanced tribological properties of multilayer DLC films via alternating-energy deposition

作者：Naizhou Du, Yongxin Wang, Xubing Wei, Peng Guo, Rende Chen, Hao Li, Chengyuan Liu, Chengyuan Liu, Aiping Lin, Kwang-Ryeol Lee, Xiaowei Li · 发表于：Carbon · 年份：2025 · DOI：10.1016/j.carbon.2025.120721 · 被引用次数：5 · 研究领域：Diamond and Carbon-based Materials Research、Metal and Thin Film Mechanics、Advanced materials and composites