Demonstration of Monolithic Integration of InAs Quantum Dot Microdisk Light Emitters and Photodetectors Directly Grown on On-Axis Silicon (001)

作者：Shuaicheng Liu, Hao Liu, Jihong Ye, Hao Zhai, Weihong Xiong, Yisu Yang, Jun Wang, Qi Wang, Yongqing Huang, Xiaomin Ren · 发表于：Micromachines · 年份：2025 · DOI：10.3390/mi16080897 · 被引用次数：3 · 研究领域：Photonic and Optical Devices、Photonic Crystals and Applications、Neural Networks and Reservoir Computing

Silicon-based microcavity quantum dot lasers are attractive candidates for on-chip light sources in photonic integrated circuits due to their small size, low power consumption, and compatibility with silicon photonic platforms. However, integrating components like quantum dot lasers and photodetectors on a single chip remains challenging due to material compatibility issues and mode field mismatch problems. In this work, we have demonstrated monolithic integration of an InAs quantum dot microdisk light emitter, waveguide, and photodetector on a silicon platform using a shared epitaxial structure. The photodetector successfully monitored variations in light emitter output power, experimentally proving the feasibility of this integrated scheme. This work represents a key step toward multifunctional integrated photonic systems. Future efforts will focus on enhancing the light emitter output power, improving waveguide efficiency, and scaling up the integration density for advanced applications in optical communication.