A scalable zinc-based coordination network for energy-efficient NF 3 /CF 4 separation with unprecedented selectivity

作者：Yitao Li, Weilin Li, Liping Zhang, Na Geng, Li Xu, Shaomin Wang, Tingyu Zhu, Qingqing Guan, Yang Guo, Xingxing Li, Qing‐Yuan Yang · 发表于：Chemical Science · 年份：2025 · DOI：10.1039/d5sc04966k · 被引用次数：6 · 研究领域：Ammonia Synthesis and Nitrogen Reduction、Metal-Organic Frameworks: Synthesis and Applications、Inorganic Fluorides and Related Compounds

(4.8 Å). This advance enables cost-effective gas purification at $12.3 per kilogram, providing a practical solution for sustainable semiconductor manufacturing.