Integration of ITO-In 2 O 3 Thin-Film Thermocouples on NiCoCrAlY Coating for In Situ Aeroengine Alloy Blades Temperature Monitoring

作者：Jiangjiang Liu, Zhongkai Zhang, Bian Tian, Zhaojun Liu, Luntao Chen, Nengchao Lu, Jiaming Lei, Bogang Liu, Shuimin Li, X. G. Fan, Le Li · 发表于：IEEE Sensors Journal · 年份：2025 · DOI：10.1109/jsen.2025.3592265 · 被引用次数：3 · 研究领域：Advanced Sensor Technologies Research、Advanced Measurement and Detection Methods、Calibration and Measurement Techniques

Monitoring the internal temperature of aero-engines is crucial for ensuring their performance and safety, as excessive temperatures can lead to engine failure. However, traditional temperature measurement methods exhibit limitations, such as interference with the flow field and an inability to conduct in-situ temperature measurements while providing real-time feedback. In this study, a multi-node thermocouple sensor was developed for the in-situ temperature detection of the surface of aero-engine blades. The thin film architecture of the sensor facilitates in-situ preparation without disrupting the surface smoothness of the tested component. To achieve this, a multi-layer film structure was created on the blade surface using microelectromechanical systems (MEMS) technology, employing NiCoCrAlY alloy as the transition layer and Al2O3 as the insulating layer material. ITO-In2O3 thin film thermocouples (TFTCs) were subsequently deposited directly onto the surface of the aero-engine turbine blades using magnetron sputtering technology (MST). Performance tests indicate that TFTCs sensors annealed at 900°C can achieve an average Seebeck coefficient of 64.30 μV/°C, with a repeatability of 96.9% at 850°C and a laser dynamic response time of 11.69 μs. Under high-temperature airflow conditions, the sensor maintained excellent thermoelectric output performance and temperature measurement capability. The proposed sensor, after further optimization, may be suitable for in-situ monitoring ...