Normal incident optical reflectance spectroscopy for thin-film thickness measurement with genetic algorithm

作者：Jiao Bai, Huaming Chen, Junguang Chen, Haowei Yang, Xinghui Li, Yan Shi, Jiangfeng Song · 发表于：Measurement · 年份：2025 · DOI：10.1016/j.measurement.2025.118511 · 被引用次数：5 · 研究领域：Surface Roughness and Optical Measurements、Semiconductor Lasers and Optical Devices、Advanced Sensor Technologies Research