Optimization of Waveguide Bend Loss in Integrated Optical Gyroscope Based on CMA-ES Algorithm

作者：Yuefeng Shen, Xinran Zhao, Guangxin Zhang, Ziqiang Zhao, Zhiyou Jiang, Cui Liang, Yilan Zhou, Zhijian Hu, Tengchao Huang · 发表于：IEEE Sensors Journal · 年份：2025 · DOI：10.1109/jsen.2025.3589254 · 被引用次数：2 · 研究领域：Advanced Fiber Optic Sensors、Photonic and Optical Devices

The on-chip integrated sensing ring, a fundamental component of integrated optical gyroscopes, significantly influences its performance, including detection resolution, zero-bias stability, and angle random walk. Reducing the propagation loss in the sensing ring is one of the most effective ways to improve the gyroscope performance. Compared to other laborious loss reduction approaches, such as modifying fabrication processes, optimizing the waveguide geometry proves to be a more flexible and economical strategy and has become a crucial technique to build exceptional integrated gyroscopes. In this paper, we design 90° bent silicon nitride waveguides for ultralow-loss quasi-rectangular integrated sensing rings based on the Covariance Matrix Adaptation Evolution Strategy (CMA-ES) algorithm. The CMA-ES algorithm optimizes the width and the trace of the bends in a global parameter space. The simulation results demonstrate significant loss reduction up to over three orders of magnitude in the spectrum range of 1500-1600 nm for 90° bent waveguides across varying radii, dimensions, and structural configurations. In addition, an ultra-low loss of less than 2 × 10-5dB/90° at single wavelength was achieved in a bend of 300 μm effective radius in our optimization, with huge potential awaiting further exploration. The experimental results demonstrate good agreement with the simulated data, confirming the effectiveness of this optimization method and its clear engineering significance. Th...