Meta‐Dispersive 3D Chromatic Confocal Measurement

作者：Jiajun Wu, Jin Yao, An Ren, Zheng Ju, Rong Lin, Zhihui Wang, Wu-Le Zhu, Bing‐Feng Ju, Din Ping Tsai · 发表于：Advanced Science · 年份：2025 · DOI：10.1002/advs.202508774 · 被引用次数：8 · 研究领域：Advanced Optical Imaging Technologies、Random lasers and scattering media、Ocular Surface and Contact Lens

3D reconstruction can perceive the detailed structures of real-world objects. Integrating metasurfaces with stereo vision or structured-light projection enables compact and efficient 3D reconstruction systems, beneficial for next-generation sensing, augmented reality, and biomedical applications. Nevertheless, the limitations inherent in these visual measurement methods pose a significant challenge to achieving higher resolution. Here, a dispersive metalens (DML) combined with the chromatic confocal method is proposed to achieve high-precision 3D measurement. With appropriate engineered dispersion, the linearity of the dispersion is well maintained, alongside diffraction-limited focusing performance. As a proof-of-concept, experiments on both longitudinal and transversal measurements are conducted. Following the calibration of the DML, axial accuracy of ±4 µm and a subwavelength axial resolution of 0.325 µm is achieved. The successful reconstruction of a fabricated 3D USAF-1951 resolution test chart further corroborates the 3D measurement capability, demonstrating a lateral resolution exceeding 4.38 µm. It is envisioned that the proposed method will pave the way for future applications in areas such as microstructure characterization, industrial inspection, and on-chip 3D optical metrology.