Low-loss Sb 2 S 3 optical phase shifter enabled by optimizing sputtering conditions

作者：Yuto Miyatake, Tomohiro Anda, Yosuke Wakita, Kotaro Makino, Shogo Hatayama, Makoto Okano, Kasidit Toprasertpong, Shinichi Takagi, Mitsuru Takenaka · 发表于：Optical Materials Express · 年份：2025 · DOI：10.1364/ome.568607 · 被引用次数：4 · 研究领域：Chalcogenide Semiconductor Thin Films、Phase-change materials and chalcogenides、Crystal Structures and Properties

By quantitatively evaluating the atomic concentrations of sputtered Sb 2 S 3 films with different sputtering powers and Ar flows, we reveal that a sputtered Sb 2 S 3 film becomes close to the stoichiometric composition as the sputtering power and Ar flow decrease. We characterize the optical properties of Sb 2 S 3 and show that the lower sputtering power leads to a better figure of merit of Sb 2 S 3 as an optical phase shifter in the near infrared (NIR) range. Based on these results, we achieve a loss per phase shift of 0.33 dB/π at a wavelength of 1.55 μm, one of the lowest losses among Sb 2 S 3 phase shifters in the NIR range.