Suspended nanomembrane silicon micro-disk for cross-sensitivity-free, high-concentration, large-dynamic range CO2 sensing

作者：Qiyue Lang, Rongxiang Guo, Si Chen, Yichen Liu, Xingyu Liu, Zunyue Zhang, Tiegen Liu, Jiaqi Wang, Zhenzhou Cheng · 发表于：Sensors and Actuators B Chemical · 年份：2025 · DOI：10.1016/j.snb.2025.138260 · 被引用次数：8 · 研究领域：Advanced Sensor and Energy Harvesting Materials、Advanced Fiber Optic Sensors、Advanced MEMS and NEMS Technologies