Modeling of axial force and torque in UAD of polycrystalline 3C-SiC

作者：Guofu Gao, Haoxiang Wang, R. Li, Bingyang Zhang, Wenbin Ma, Daohui Xiang, Junjin Ma · 发表于：International Journal of Mechanical Sciences · 年份：2025 · DOI：10.1016/j.ijmecsci.2025.110559 · 被引用次数：8 · 研究领域：Advanced Surface Polishing Techniques、Silicon Carbide Semiconductor Technologies、Metal and Thin Film Mechanics