Research progress on preparation techniques, properties, and applications of tantalum (Ta) coatings: A review

作者：Doudou Xiong, Naiming Lin, Hao Ye, Ziyang Dai, Kaiwei Wang, Hongbo Tan, Qunfeng Zeng, Meisam Nouri · 发表于：Materials Today Communications · 年份：2025 · DOI：10.1016/j.mtcomm.2025.113196 · 被引用次数：7 · 研究领域：Metal and Thin Film Mechanics、Advanced materials and composites、Semiconductor materials and devices