Influence of SiC surface/subsurface state on laser ablation thresholds

作者：Haixu Liu, Zhipeng Li, Ping Zhang, Dunwen Zuo · 发表于：Materials Science in Semiconductor Processing · 年份：2025 · DOI：10.1016/j.mssp.2025.109765 · 被引用次数：3 · 研究领域：Diamond and Carbon-based Materials Research、Laser Material Processing Techniques、Laser-Ablation Synthesis of Nanoparticles