A high-bandwidth compact micro/nano-positioning stage based on a double parallelogram compliant mechanism

作者：Tao Zhang, Wantao Zhu, Donglong Bian, Xingxiang Li, Rui Ma, Wanyun Ding, Yuhang Wang · 发表于：Smart Materials and Structures · 年份：2025 · DOI：10.1088/1361-665x/addf95 · 被引用次数：8 · 研究领域：Piezoelectric Actuators and Control、Advanced MEMS and NEMS Technologies、Force Microscopy Techniques and Applications

Abstract This paper introduces a novel piezoelectric actuator (PEA)-driven two-degree-of-freedom micro/nano-positioning stage for high-precision adjustments in small-space situations. To enhance stage compactness and dynamic performance while significantly reducing parasitic motions, the composite leaf-type double parallelogram mechanism and the leaf-type double parallelogram mechanism are presented for implementation in guided and decoupled mechanisms, respectively. The composite bridge arm structure and compact double parallelogram design enable the amplification mechanism to provide significant lateral rigidity and safeguard the PEA.The orthogonal arrangement of the composite bridge type amplification mechanism and the dual parallelogram decoupling guiding mechanism are integrated to achieve full decoupling of the stage at both the input and output ends. The compliance matrix method and Lagrange’s equation were employed to establish mathematical analytical models of the static and dynamic characteristics, which were subsequently validated through finite element analysis. The stage’s static and dynamic performances were thoroughly assessed through experiments. The closed-loop control of the PEA utilizing integral strain gauges effectively eliminates the nonlinear hysteresis issue on the stage and exhibits proficient trajectory tracking capability. The experimental findings indicate that the motion range of the precision positioning stage is 51.71 × 49.56 µ m 2 , the output ...