Towards precise trimming and programming of photonic integrated circuits

作者：April Logan, Xia Chen, Xingshi Yu, Weihong Shen, Xingzhao Yan, Weiwei Zhang, Goran Z. Mashanovich, Graham T. Reed, David J. Thomson · 年份：2025 · DOI：10.1109/siphotonics64386.2025.10984480 · 被引用次数：3 · 研究领域：Photonic and Optical Devices、Semiconductor Lasers and Optical Devices、Optical Network Technologies

Methods to achieve a high-resolution phase trimming within silicon waveguides incorporating Ge implanted sections are investigated. The trimming is performed electrically using on-chip microheaters. The average resolution of phase change per voltage pulse achieved by this work was approximately 0.0007π radians.