High-precision micro-nano fabrication using two-photon etching and spatial light modulators

作者：Ke Xu, Xianru Li, Haifeng Gong, Yunpeng Li, Xiaoduo Wang · 发表于：Optics Communications · 年份：2025 · DOI：10.1016/j.optcom.2025.131947 · 被引用次数：5 · 研究领域：Nanofabrication and Lithography Techniques、Advanced Surface Polishing Techniques、Nonlinear Optical Materials Studies