An NV Magnetometer With High Fluorescence Excitation and Collection Efficiency Using Silicon-Based MEMS Process

作者：Qingli Zhang, Hui Wang, Guozheng Wang, Doudou Zheng, Chenyu Hou, Jianghao Fu, Li Qin, Huan Fei Wen, Zhonghao Li, Xin Li, Hao Guo, Jun Tang, Yan Jun Li, Zongmin Ma, Jun Liu · 发表于：IEEE Sensors Journal · 年份：2025 · DOI：10.1109/jsen.2025.3561502 · 被引用次数：3 · 研究领域：Magnetic Field Sensors Techniques、Characterization and Applications of Magnetic Nanoparticles、Advanced MEMS and NEMS Technologies

The fabrication of nitrogen-vacancy (NV) center magnetometers utilizing micro-electro-mechanical systems (MEMS) has gained popularity due to the low cost, good consistency and easy of system integration. This article presents the fabrication of an NV magnetometer using MEMS process, which integrates a silicon-based resonator for microwave transmission, a diamond waveguide for fluorescence emission and a silicon-based reflector for fluorescence collection. The magnetometer operates on the principle of continuous-wave optically detected magnetic resonance (CW-ODMR) for magnetic field detection. The inhomogeneity of the silicon-based resonator in the 1.9 mm × 1.9 mm area of hole is 7.7%. The combined effect of the silicon-based reflector and diamond waveguide achieves a 2.82-fold enhancement in fluorescence collection efficiency. The silicon-silicon interface between the resonator and reflector components is fabricated via thermal compression bonding to form a groove for subsequent diamond waveguide integration. The processed components are placed within a ceramic tube shell and subsequently encapsulated in glass. The integrated magnetometer, with dimensions of 14 mm × 14 mm × 12 mm, achieves a sensitivity of 901.96 pT/Hz1/2within the 1-55 Hz, a photon shot noise limited sensitivity of 121 pT/Hz1/2, and a magnetic field detection range of ±168.2 μT.