Development of yellow-light TiO 2 integrated photonics

作者：Zequn Chen, Yiheng Tang, Maoliang Wei, Xiaojing Li, Boshu Sun, Yingchun Wu, Sishuo Zou, Jiping Huang, Ke Si, Wei Gong, Hongtao Lin, Lan Li · 发表于：Optics Letters · 年份：2025 · DOI：10.1364/ol.560919 · 被引用次数：3 · 研究领域：Photonic and Optical Devices

Visible-light photonic integrated circuits (PICs) are rapidly emerging as a crucial technology to overcome the scaling challenges in quantum information processing and biosensing. Titanium dioxide (TiO 2 ), with its high transparency in the visible range, is regarded as a promising material for facilitating the development of high-performance visible-light integrated systems. In this paper, we introduce a series of passive TiO 2 integrated devices, which include waveguides, multimode interferometers (MMIs), and thermo-optic switches (TOSs), monolithically integrated for the first time to our knowledge at a working wavelength of 589 nm. A propagation loss of 5.46 ± 0.17 dB/cm demonstrates a significant improvement over previous reports on yellow-light TiO 2 waveguides. This study marks the first fabrication of a TOS operating at 589 nm, featuring a TiO 2 core and polymer cladding. Notably, it achieves a power consumption (P π ) of 8.24 mW, which represents a threefold reduction compared to silicon nitride-based TOSs operating in the visible spectrum. These results offer new insight into the design and fabrication of visible waveguide-integrated devices, paving the way for future emerging applications, such as quantum information, sensors, and biomedical science.