A MEMS capacitive vacuum pressure sensor featuring dual sealed cavities

作者：Gang Li, Tao Xu, Huzhong Zhang, Zhenhua Xi, Wenze Tao, Wenjie Jia, Deyan He, Xiaodong Han · 发表于：Vacuum · 年份：2025 · DOI：10.1016/j.vacuum.2025.114334 · 被引用次数：8 · 研究领域：Advanced MEMS and NEMS Technologies、Plasma Diagnostics and Applications、Mechanical and Optical Resonators