A high sensitivity capacitive micromachined ultrasonic transducer (CMUT) with stepped cavity structure

作者：Haoliang Jia, Wangyang Zhang, Tao Liu, Lei Ren, Shaohui Qin, Jiawei Yuan, Libo Zhao, Zhikang Li, Xiaojing Mu · 发表于：Sensors and Actuators A Physical · 年份：2025 · DOI：10.1016/j.sna.2025.116519 · 被引用次数：5 · 研究领域：Ultrasound Imaging and Elastography、Ultrasonics and Acoustic Wave Propagation、Piezoelectric Actuators and Control