Development of Low Energy and High Resolution Ultraviolet Photoelectron Spectroscopy Instrument

作者：Xiaohan Hou, Yu Chen, Sichao Zhang, Yali Guo, Bohao Tong, Linhuan Wei, Chaobo Zhang, Long Chen, Shuang Wang, Hisao Ishii · 年份：2024 · DOI：10.1109/icsmd64214.2024.10920516 · 被引用次数：1 · 研究领域：Thin-Film Transistor Technologies、Photocathodes and Microchannel Plates、Ga2O3 and related materials

The fine characterization of electronic structure is a key parameter for aerospace and semiconductor materials performance regulation, and the interaction between ultraviolet light and the material surface is an important influence on the characterization of electronic structure. There is an urgent need to develop the ultraviolet photoelectron spectroscopy instrument. This paper first introduces the ultraviolet photoelectron yield spectroscopy and ultraviolet photoelectron spectroscopy measurement and analysis technology. Based on the continuous adjustable ultraviolet photoelectron yield spectroscopy-energy spectroscopy joint measurement and analysis technology, the low energy and high resolution ultraviolet photoelectron spectroscopy instrument has been designed and developed. The functional debugging and performance testing have also been operated. In the case of the gold material, we examined the electronic structure information, such as its ionization energy and fermi level. The instrument has already realized the electronic structure characterization of metal materials by combining ultraviolet photoelectron spectroscopy (UPS) and ultraviolet photoelectron yield spectroscopy (PYS).